Metal Oxıde Uv Detector Array Fabrıcatıon And Characterızatıon

Thesis Type: Postgraduate

Institution Of The Thesis: Gazi Üniversitesi, Fen Bilimleri Enstitüsü, Turkey

Approval Date: 2019




To date, it is possible to find photodetector array production in different regions of the optical spectrum. Within the scope of thesis study; It is produced by microfabrication methods of UV detector array with 640x512 resolution based on Metal Oxide base working in ultraviolet (UV) region of optical spectrum. The produced photodetector array, optical and electronic components are combined to develop a camera that can receive images in the UV region. In the literature, no UV images taken with Metal Oxide photodetector array have been reported so far. The Metal Oxide photodetector array has been formed from the matrix-shaped sequences of the 640X512 line column dimensions of the photodetector using UV light absorption properties of Metal Oxide materials with broad band energy. The photodetector array was produced in Bilkent University class 100 clean rooms. In the fabrication of devices, was performed using micro-fabrication techniques such as thin-film magnification and photolithography. In the fabrication of the devices, photolithography, RF magnetron scattering, thermal and electron beam evaporation methods were used on the sapphire bottomstone, photodetector array was formed using structure of thin film layers. Electrical and optical characterization of the produced photodetector sequences has been made and photodetector and photodetector array which has a responsivity of 0,65 A/W at 365 nm wavelength and response between 250 nm and 400 nm have been produced. With the generated photodetector array is connected to the camera electronics, along with the camera optics and camera electronics, it has become the camera that can receive images in the UV regio