Investigation of the effect of annealing on the structural, morphological and optical properties of RF sputtered WO3 nanostructure

Efkere H. İ., Gumrukcu A. E., Özen Y., Kinaci B., Aydın S. Ş., Ates H., ...Daha Fazla

PHYSICA B-CONDENSED MATTER, cilt.622, 2021 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 622
  • Basım Tarihi: 2021
  • Doi Numarası: 10.1016/j.physb.2021.413350
  • Dergi Adı: PHYSICA B-CONDENSED MATTER
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, PASCAL, Aerospace Database, Chemical Abstracts Core, Communication Abstracts, INSPEC, Metadex, Civil Engineering Abstracts
  • Anahtar Kelimeler: WO3, Transparent metal oxides, Rf sputtering system, Annealing temperature, CACU3TI4O12 THIN-FILM, SURFACE-MORPHOLOGY, SOL-GEL, PHOTOCATALYTIC ACTIVITY, OXIDE, NANOPARTICLES, PERFORMANCE, NANORODS
  • Gazi Üniversitesi Adresli: Evet

Özet

In this study, we focused on examining the effect of annealing on the structural, morphological, and optical properties of the tungsten oxide (WO3) nanostructures. WO3 nanostructure deposited on n-type Si substrate using the radio frequency (RF) magnetron sputtering system. The WO3 nanostructure was divided into 6 parts. 5 samples except as-deposited samples were individually annealed at various temperatures ranging from 300 degrees C to 700 degrees C (by step 100 degrees C) in a conventional thermal annealing furnace (CTA) for 1 h. The stoichiometry of the asdeposited WO3 was determined by SEM-EDS and XPS measurements. Structural, morphological, and optic properties of the as-deposited and different annealed temperatures WO3 nanostructures were characterized by XRD, AFM, Uv-Vis and PL measurements. The effects of annealing on material analysis and properties were reported with a comparative study. It has been reported that the annealed WO3 nanostructure can be preferred as an effective material for device applications.