PHYSICA B-CONDENSED MATTER, cilt.622, 2021 (SCI-Expanded)
In this study, we focused on examining the effect of annealing on the structural, morphological, and optical properties of the tungsten oxide (WO3) nanostructures. WO3 nanostructure deposited on n-type Si substrate using the radio frequency (RF) magnetron sputtering system. The WO3 nanostructure was divided into 6 parts. 5 samples except as-deposited samples were individually annealed at various temperatures ranging from 300 degrees C to 700 degrees C (by step 100 degrees C) in a conventional thermal annealing furnace (CTA) for 1 h. The stoichiometry of the asdeposited WO3 was determined by SEM-EDS and XPS measurements. Structural, morphological, and optic properties of the as-deposited and different annealed temperatures WO3 nanostructures were characterized by XRD, AFM, Uv-Vis and PL measurements. The effects of annealing on material analysis and properties were reported with a comparative study. It has been reported that the annealed WO3 nanostructure can be preferred as an effective material for device applications.