Fabrication and Characterization of Silicon Nitride ThinFilms by Plasma Enhancement Chemical VapourDeposition PECVD

ODABAŞI E., ARAS G., ORHAN E., BOYDAŞ E.

World Conference on Technology, Innovation and Entrepreneurship, 28 - 31 Mayıs 2015

  • Yayın Türü: Bildiri / Özet Bildiri
  • Gazi Üniversitesi Adresli: Evet