Analysis of Electrical Characteristics of Metal-Oxide-Semiconductor Capacitor by Impedance Spectroscopy
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, cilt.9, sa.4, ss.515-519, 2014 (SCI-Expanded, Scopus)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 9 Sayı: 4
- Basım Tarihi: 2014
- Doi Numarası: 10.1166/jno.2014.1630
- Dergi Adı: JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Sayfa Sayıları: ss.515-519
- Gazi Üniversitesi Adresli: Evet
Özet
The electrical characteristics of AuGe/SiO2/p-Si (MOS) capacitor were analyzed by impedance spectroscopy in a wide frequency range. The equivalent circuit model consisting of a parallel resistor (R-p) and capacitor (C-p) in series with a series resistance (R-s) was found to give a well fit to the measured data of MOS capacitor. The values of R-s, R-p and C-p were obtained from the Cole-Cole plots indicating a single semicircle. The value of C-p remains almost constant while the R-p decreases with bias voltage. Also, the variation of resistance with dc bias voltage showed that conduction mechanism of the capacitor was space charge limited current with exponential trap distribution.