Investigation of the Structural, Morphological, Optical and Electrical Properties of In2O3 Thin Films: Gas Sensor Applications

Asar, TARIK; Korkmaz, Burak; Efkere, HALİL; Akın Sönmez, NİHAN; Özçelik, SÜLEYMAN

doi:10.2339/politeknik.403971

Investigation of the Structural, Morphological, Optical and Electrical Properties of In2O3 Thin Films: Gas Sensor Applications

Atıf İçin Kopyala

Asar T., Korkmaz B., Efkere H. İ., Akın Sönmez N., Özçelik S.

JOURNAL OF POLYTECHNIC-POLITEKNIK DERGISI, cilt.21, ss.265-271, 2018 (ESCI)

Yayın Türü: Makale / Tam Makale
Cilt numarası: 21
Basım Tarihi: 2018
Doi Numarası: 10.2339/politeknik.403971
Dergi Adı: JOURNAL OF POLYTECHNIC-POLITEKNIK DERGISI
Derginin Tarandığı İndeksler: Emerging Sources Citation Index (ESCI), TR DİZİN (ULAKBİM)
Sayfa Sayıları: ss.265-271
Gazi Üniversitesi Adresli: Evet

Özet

In this study, two In2O3 thin films were prepared at 50W and 100W target power by using RF magnetron sputtering technique. The structural, morphological and optical properties of the produced thin films were investigated. The In2O3 gas sensors were produced by completing the fabrications of In2O3 thin films. The gas sensors were tested with changing butane gas concentration, application voltage and sensor operating temperature. When the test results were examined, it was seen that both of the produced sensors were found to be suitable for using with different sensor operating temperatures and gas concentrations.