Effects of gamma irradiation on dielectric characteristics of SnO2 thin films


Selcuk A. B., Ocak S., Yuksel O. F.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, cilt.594, sa.3, ss.395-399, 2008 (SCI-Expanded) identifier identifier

Özet

In this work, a tin oxide film was prepared on a silicon wafer. It has exhibited the typical behaviour of a metal-oxide-semiconductor (MOS) structure. This MOS structure was stressed with Co-60-gamma radiation in the total dose range of 0-500 kGy at room temperature. The effects of the Co-60 gamma radiation on the following properties of Au/SnO2/n-Si (MOS) structures, have been determined before and after irradiation: dielectric constant (epsilon'), imaginary dielectric constant (epsilon''), dielectric loss tangent (tan delta) and AC conductivity (sigma(AC)). The values of epsilon', epsilon'', tan delta and sigma(AC) show a strong dependence on the applied voltage and radiation dose. Additionally, the dielectric properties of MOS structures have been found to be strongly influenced by the presence of dominant radiation-induced defects. Experimental results show that the interfacial polarization contributes to the improvement of the dielectric properties of Au/SnO2/n-Si (MOS) structures. The capacitance and conductance measurements are corrected for series resistance before and after irradiation. (C) 2008 Elsevier B.V. All rights reserved.