In the present paper, 25 dots of the Au/n-Si/Al Schottky diode have been prepared on the same n-type Si wafer by evaporation of Au as Schottky contact. The some parameters of Schottky diodes have been investigated by means of capacitance-voltage (C-V) and conductance-voltage (G-V) measurements at 1 MHz. The values of measured capacitance (C-m) and conductance (G(m)) under both reverse and forward bias have been corrected for the effect of series resistance to obtain the real the interface state density (N-ss) values. The values of the N-ss and Rs of the diodes ranged from 3.566 x 10(12) to 6.024 x 10(12) eV(-1) cm(-2) and from 39.42 to 45.28 Omega from the reverse bias C-V and G-V measurements. Furthermore, the mean values of R-s and N-ss were found to be 41.01 Omega and 4.858 x 10(12) eV(-1) cm(-2), respectively.