RECIPE OPTIMIZATION FOR SYNTHESIS OF ZNO AND AL2O3 THIN FILM BY USING ATOMIC LAYER DEPOSITION

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ATEŞ H., sönmez m., yüksel m., kupa i., BAHÇECİ E., DEPCİ T., ...More

4 T H I N T E R N A T I O N A L C O N F E R E N C E O NE N G I N E E R I N G A N D N A T U R A L S C I E N C E S, Kiev, Ukraine, 2 - 06 May 2018, pp.8-12

• Publication Type: Conference Paper / Full Text
• City: Kiev
• Country: Ukraine
• Page Numbers: pp.8-12
• Gazi University Affiliated: Yes