Akademik Veri Yönetim Sistemi
JOURNAL OF ELECTROCERAMICS, cilt.20, sa.3-4, ss.277-286, 2008 (SCI-Expanded)
In the last decades piezoelectrically driven ultrasonic motors have become alternative actuators to the conventional electromagnetic motors especially for precise and accurate servo positioning applications. Different types of ultrasonic motors have been constructed and manufactured. Several drive systems have been designed, implemented and proposed for these motors. A variety of control techniques have been applied to them. The research given in this study covers bases of the ultrasonic motors. Theoretical background, modeling, drive systems, control techniques and applications of the ultrasonic motors have been introduced. Firstly, the general overview has been given. Then, modeling studies focused on performance estimation and analysis of ultrasonic motors have been examined. Afterwards, drive systems and control techniques of ultrasonic motors have been investigated. Furthermore, an example drive and control system has been presented. This drive system has been designed as to be controlled digitally. In addition, the important industrial and research applications of these motors have been included. The presented study has been arranged as a review of ultrasonic motors. The important points of specifications, models, drive systems and control methods of the ultrasonic motors have been emphasized.