Swanepoel method for AlInN/AlN HEMTs

Akpinar O., Bilgili A. K., Baskose U. C., Ozturk M., ÖZÇELİK S., ÖZBAY E.

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, cilt.31, sa.13, ss.9969-9973, 2020 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Derleme
  • Cilt numarası: 31 Sayı: 13
  • Basım Tarihi: 2020
  • Doi Numarası: 10.1007/s10854-020-03590-6
  • Dergi Adı: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Aerospace Database, Applied Science & Technology Source, Chemical Abstracts Core, Communication Abstracts, Compendex, Computer & Applied Sciences, INSPEC, Metadex, Civil Engineering Abstracts
  • Sayfa Sayıları: ss.9969-9973
  • Gazi Üniversitesi Adresli: Evet

Özet

In this study, AlInN/AlN high electron mobility transistor (HEMT) structure is grown on c-oriented sapphire substrate using metal organic chemical vapor deposition method. Optical properties of the structure are investigated by photoluminescence (PL) and ultraviolet (UV-Vis.) spectras. According to PL results, direct bandgap of AlN is determined around 2.80 eV. In UV-Vis. spectra it is seen that conduction of AlInN layer starts at 360 nm. Swanepoel envelope method is applied on transmission spectra and some optical properties such as refractive index (n), film thickness (t), absorption coefficient (alpha), and extinction coefficient (k) are determined. Forbidden energy bandgap is determined again from Tau method and it is compared with the value gained from PL spectra. This study is a rare one that presents optical properties of HEMTs using Swanepoel and Tau methods. In addition to this, it helps estimating how optical properties of HEMTs effect electrical properties.