Fabrication and Characterization of Silicon Nitride ThinFilms by Plasma Enhancement Chemical VapourDeposition PECVD

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ODABAŞI E., ARAS G., ORHAN E., BOYDAŞ E.

World Conference on Technology, Innovation and Entrepreneurship, 28 - 31 Mayıs 2015, (Özet Bildiri)

• Yayın Türü: Bildiri / Özet Bildiri
• Gazi Üniversitesi Adresli: Evet