A Fast AFM Probe with Integrated Interferometric Sensing and Electrostatic Actuation

Değertekin F. L., Onaran A. G., BALANTEKİN M., Gorp B. V., Parlak Z.

ECS Meeting, United States Of America, 7 - 12 October 2007

  • Publication Type: Conference Paper
  • Country: United States Of America
  • Gazi University Affiliated: No