Structural engineering of multi-period (TiMo)N/ZrN vacuum arc coatings

Sobol O., Pinchuk N., Meylekhov A. A., Subbotina V. V., Dur O., Stolbovoy V. A., ...Daha Fazla

FUNCTIONAL MATERIALS, cilt.27, sa.4, ss.736-743, 2020 (ESCI) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 27 Sayı: 4
  • Basım Tarihi: 2020
  • Doi Numarası: 10.15407/fm27.04.736
  • Dergi Adı: FUNCTIONAL MATERIALS
  • Derginin Tarandığı İndeksler: Emerging Sources Citation Index (ESCI), Scopus, Compendex
  • Sayfa Sayıları: ss.736-743
  • Anahtar Kelimeler: structural engineering, vacuum arc technology, coating, Layer thickness, bias potential, structure, substructure, stress-strain state, hardness, STRESS GRADIENT ANALYSIS, THIN-LAYERS, HARDNESS, STATE, MICROSTRUCTURE, SUPERHARDNESS, DEPOSITION, ELEMENTS, NITRIDE
  • Gazi Üniversitesi Adresli: Evet

Özet

The effect of the bias potential applied to the substrate during deposition and the layer thickness on the elemental composition, structure, substructure, and stress-strain state of (TiMo)N/ZrN layers of multi-period coatings is studied. The results of elemental analysis indicate a decrease in the ratio (Ti + Mo)/Zr with an increase in the bias potential and with a decrease in the layer thickness. At the structural level, appearance of additional diffraction peaks for (TiMo)N/ZrN coatings with the thinnest (about 12 nm) layers was revealed. The appearance of such peaks is explained by the effect of mixing at the interface between layers due to the implantation of accelerated particles. It was found that alloying of Ti with Mo atoms in (TiMo)N layers leads to a large compression strain (about 5 %). In monometallic ZrN layers, the value of macrostrain is more than 2 times smaller. At the substructural level, the formation of (TiMo)N solid solution also leads to higher microdeformation in comparison with a similar parameter in ZrN monometallic layers. The hardness of multi-period (TiMo)N/ZrN composites reaches a high value of 35 GPa.