Akademik Veri Yönetim Sistemi
Uluslararası İstanbul Modern Bilimsel Araştırmalar Kongresi 5-7 Temmuz 2024, İstanbul ICP PLASMA FOR CHLORINE AND ARGON GAS MİXTURE AT LOW PRESSURES, İstanbul, Türkiye, 5 - 07 Temmuz 2024, ss.1-2
An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is generated bythe radio frequency (RF) generator that provides a constant energy to maintain the plasma at ahigh power (1 kW) RF signal at 50 MHz for a load coil wrapped around the ICP torch forpressures 1 and 4 Torr in the case of a gas mixture of 20 percent chlorine and 80 percentArgon. A high-velocity inert gas mixture (%20 Chlorine and %80 Argon) produces a hightemperature plasma with changing magnetic flux around the vertical plane of the coil causingthe excitation of the charges in the plasma zone. The effect of the electrode is eliminateddepending upon the geometry for ICP unlike other plasma formations. Inductive plasma is anefficient, albeit expensive, method of providing long-lasting, energy-efficient lighting sourcesfor high-density plasma sources that promise the future developments in plasmacharacterization. It is conluded that ICP of RF power (50 MHz) can produce 2.14x1018 (1/m-3)surface electron density under (1 kW) RF signal. This study reports power efficiency forvarying Chlorinie ratios for current flowing through the coil. 2D spatial distribution of electricpotential is evaluated for binary Argon/Chlorine (80:20) to see the effect of the gas mixtureon charge transport kinetics for ICP at 1 Torr. The stability of the electric potential isimportant for the application of ICP in optimization of plasma cells.
An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is generated bythe radio frequency (RF) generator that provides a constant energy to maintain the plasma at ahigh power (1 kW) RF signal at 50 MHz for a load coil wrapped around the ICP torch forpressures 1 and 4 Torr in the case of a gas mixture of 20 percent chlorine and 80 percentArgon. A high-velocity inert gas mixture (%20 Chlorine and %80 Argon) produces a hightemperature plasma with changing magnetic flux around the vertical plane of the coil causingthe excitation of the charges in the plasma zone. The effect of the electrode is eliminateddepending upon the geometry for ICP unlike other plasma formations. Inductive plasma is anefficient, albeit expensive, method of providing long-lasting, energy-efficient lighting sourcesfor high-density plasma sources that promise the future developments in plasmacharacterization. It is conluded that ICP of RF power (50 MHz) can produce 2.14x1018 (1/m-3)surface electron density under (1 kW) RF signal. This study reports power efficiency forvarying Chlorinie ratios for current flowing through the coil. 2D spatial distribution of electricpotential is evaluated for binary Argon/Chlorine (80:20) to see the effect of the gas mixtureon charge transport kinetics for ICP at 1 Torr. The stability of the electric potential isimportant for the application of ICP in optimization of plasma cells.
An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is generated by the radio frequency (RF) generator that provides a constant energy to maintain the plasma at a high power (1 kW) RF signal at 50 MHz for a load coil wrapped around the ICP torch for pressures 1 and 4 Torr in the case of a gas mixture of 20 percent chlorine and 80 percent Argon. A high-velocity inert gas mixture (%20 Chlorine and %80 Argon) produces a high temperature plasma with changing magnetic flux around the vertical plane of the coil causing the excitation of the charges in the plasma zone. The effect of the electrode is eliminated depending upon the geometry for ICP unlike other plasma formations. Inductive plasma is an efficient, albeit expensive, method of providing long-lasting, energy-efficient lighting sources for high-density plasma sources that promise the future developments in plasma characterization. It is conluded that ICP of RF power (50 MHz) can produce 2.14x1018 (1/m-3) surface electron density under (1 kW) RF signal. This study reports power efficiency for varying Chlorinie ratios for current flowing through the coil. 2D spatial distribution of electric potential is evaluated for binary Argon/Chlorine (80:20) to see the effect of the gas mixture on charge transport kinetics for ICP at 1 Torr. The stability of the electric potential is important for the application of ICP in optimization of plasma cells.