Back-Side Via Etching Application of SiC for GaN-Based Transistors

haliloglu m. t. , LİŞESİVDİN S. B. , ÖZBAY E.

1st Light and Light-Based Technologies Workshop, Ankara, Turkey, 15 May - 15 August 2018, pp.51

  • Publication Type: Conference Paper / Summary Text
  • City: Ankara
  • Country: Turkey
  • Page Numbers: pp.51