Investigation of Hydrogen Gas Sensing Properties of HfO2 Based Sensor Produced By Atomic Layer Deposition Method


Karaduman I., Barin O., YILDIZ D. E. , ACAR S.

JOURNAL OF POLYTECHNIC-POLITEKNIK DERGISI, vol.19, no.3, pp.223-229, 2016 (ESCI) identifier

Abstract

Fossil fuels can very quickly be exhausted condition and thus leave harmful residues such as CO 2 environment clean and reliable use of the H-2 gas as the energy source of the future are expanded in various fields. In this case, the new research on the rapidly expanding field of applications and 112 gas sensor causes the increase.