Measurement of high temperature sensitivity of Al/(Zn:Cd:Ni:TiO2)/p-Si structure based on capacitance/conductance-voltage (C/G-V)


Bengi S., ALTINDAL YERİŞKİN S., Khalkhali A., Dere A., Yıldız K., Yakuphanoglu F.

Physica Scripta, cilt.100, sa.9, 2025 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 100 Sayı: 9
  • Basım Tarihi: 2025
  • Doi Numarası: 10.1088/1402-4896/adfea3
  • Dergi Adı: Physica Scripta
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Aerospace Database, Chemical Abstracts Core, Compendex, INSPEC, zbMATH
  • Anahtar Kelimeler: Arrhenius plots, electrical parameters, series resistance and surface states, temperature and voltage dependence, temperature sensitivity, ZnCdNi:TiO2 thin film
  • Gazi Üniversitesi Adresli: Evet

Özet

In this work, a cryogenic metal oxide diode temperature sensor has been fabricated using ZnCdNi:TiO2 metal oxide semiconductor on p-type silicon substrate for thermal sensor applications. The temperature sensing performance and fundamental electrical properties of Al/(ZnCdNi:TiO2)/p-Si were investigated using temperature dependent impedance measurements. There are two linear areas for low and high temperatures in the temperature sensitivity (S) for the fixed capacitance driver mode. The highest S value of 8.3 mV K−1 at 0.10 nF was obtained at high temperatures. The capacitance/conductance values were demonstrated to be considerably affected by voltage and temperature, particularly at accumulation and depletion regimes. The reverse bias 1/C2-V characteristic was used to compute certain basic electrical parameters, including barrier height (ΦB), diffusion potential (VD), and density of acceptor atoms (NA) for each temperature. The resistance (Ri) values were calculated using the Nicollian-Brews method. Additionally, c2 values were used to derive density of surface states (NSS) values. Al/(ZnCdNi:TiO2)/p-Si’s excellent quality and performance are further demonstrated by its low RS values and suitable NSS size. Furthermore, low Arrhenius plot activation energy values (Ea) suggest that the trapped electron either hops between traps or that the conduction band predominates. Al/(Zn:Cd:Ni:TiO2)/p-Si’s suitability as thermal sensors both in low and high temperature regions supported by the variations in electrical characteristics and high S value.