Determination and Improvement of Deposition Parameters of TiO2 Thin Films via ALD


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BOZKAYA M., KUPA I., POLAT GÖNÜLLÜ M. , ZAN R., OKYAY A. K. , ATEŞ H.

Journal of Materials Science and Engineering B, vol.9, pp.32-40, 2019 (Refereed Journals of Other Institutions)

  • Publication Type: Article / Article
  • Volume: 9
  • Publication Date: 2019
  • Doi Number: 10.17265/2161-6221/2019.1-2.005
  • Title of Journal : Journal of Materials Science and Engineering B
  • Page Numbers: pp.32-40