Mosaic Structure Characterization of the AlInN Layer Grown on Sapphire Substrate
ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, cilt.2014, 2014 (SCI-Expanded, Scopus)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 2014
- Basım Tarihi: 2014
- Doi Numarası: 10.1155/2014/980639
- Dergi Adı: ADVANCES IN MATERIALS SCIENCE AND ENGINEERING
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Açık Arşiv Koleksiyonu: AVESİS Açık Erişim Koleksiyonu
- Gazi Üniversitesi Adresli: Evet
Özet
The 150 nm thick, (0001) orientated wurtzite-phase Al1-xInxN epitaxial layers were grown by metal organic chemical vapor deposition on GaN (2.3 mu m) template/(0001) sapphire substrate. The indium (x) concentration of the Al1-xInxN epitaxial layers was changed as 0.04, 0.18, 0.20, 0.47, and 0.48. The Indium content (x), lattice parameters, and strain values in the AlInN layers were calculated from the reciprocal lattice mapping around symmetric (0002) and asymmetric (10-15) reflection of the AlInN and GaN layers. The mosaic structure characteristics of the AlInN layers, such as lateral and vertical coherence lengths, tilt and twist angle, heterogeneous strain, and dislocation densities (edge and screw type dislocations) of the AlInN epilayers, were investigated by using high-resolution X-ray diffraction measurements and with a combination of Williamson-Hall plot and the fitting of twist angles.