Akademik Veri Yönetim Sistemi
JOURNAL OF POLYTECHNIC-POLITEKNIK DERGISI, cilt.1, sa.2, ss.1-9, 2024 (ESCI)
Several studies have been reported on the theoretical and experimental investigation of gas discharge-semiconductor microplasma
systems (GDSµPS).
In this study, a two-dimensional fluid model of a micro plasma in a square direct current (DC) glow-discharge chamber is simulated
using the finite-element method (FEM) solver COMSOL Multiphysics program based on mixture-averaged diffusion-drift theory
of gas discharges and Maxwellian electron energy distribution function.
A unique III-antimonide high-Ohmic semi-insulating aluminum gallium antimonide (AlGaSb) with finely digitated electron
emission surface is modeled as planar cathode electrode coupled to ITO/SiO2 planar anode electrode across a gas discharge gap of
100 µm distance. Argon (Ar) and argon mixed with a molar fraction of 5% hydrogen (Ar/H2) gas media are seperately introduced
to the micro gap at sub-atmospheric pressure of 150 Torr, and the cell is driven at 1.0 kV DC by a stationary power source to
simulate the transitions from electron field emission state to self-sustained normal glow discharge state.
The model is simulated to exhibit the transient physical characteristics of the AlGaSb-Ar/H2 glow-discharge micro plasma system
by solving the spatiotemporal dynamics of various discharge parameters including, electron density, electron energy density,
electron current density and electric potential.
It has been observed that a fraction of hydrogen addition to argon can be used as an effective tool in modeling application-specific