The electrical characteristic of an MIS structure with biocompatible minerals doped (Brushite+Monetite: PVC) interface layer

Ulusoy M., Altındal Ş., Azizian-Kalandaragh Y., Özçelik S., Mirzaei-Kalar Z.

Microelectronic Engineering, vol.258, 2022 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 258
  • Publication Date: 2022
  • Doi Number: 10.1016/j.mee.2022.111768
  • Journal Name: Microelectronic Engineering
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, PASCAL, Aerospace Database, Chemical Abstracts Core, Communication Abstracts, INSPEC, Metadex, Civil Engineering Abstracts
  • Keywords: (Brushite plus Monetite PVC) structures, Paralel conduction method, Interface states, Relaxation time, Frequency dependent, ADMITTANCE CHARACTERISTICS, VOLTAGE-DEPENDENCE, SERIES RESISTANCE, C-V, FREQUENCY, SURFACE, DIODES, STATES
  • Gazi University Affiliated: Yes


© 2022 Elsevier B.V.In this research work, by using biocompatible minerals as an additive, the electrical response of the structure was measured, and its convenience in passivating Nss was examined. The I-V and C(G)-V-f measurements were executed with wide range voltages (from −3 V to +4 V (0.05 V steps)) and frequencies (from 2 kHz to 2 MHz) at room temperature. When the Ri-V curves were examined, significant increases were observed in the depletion region. Additionally, the Rs value was obtained as approximately 380 Ω at 2 MHz from C-V measurements. Main parameters such as n, I0, ϕB0, Rs and RR obtained from I-V measurements are 2.46, 1.28×10−9 A, 0.822 eV, 1.56 kΩ, and 1.5×105, respectively. The fluctuations of Nss depending on both voltage and energy distribution were investigated with three different methods. The Nss average value obtained from the I-V measurement is approximately 2.8×1013 eV−1.cm2. From the Chf-Clf method, the average Nss value is approximately 1.33×1012 eV−−2. Finally, from the conductance method, the Nss and τ values vary from 2.30×1011 eV−−2 to 1.16×1012 eV−−2, and from 1.37×10−5 s to 5.25×10−5 s, respectively. With this method, the average Nss value was calculated as 8×1011 eV−−2.