Effect of Temperature on the Development of Zirconium Diboride (ZrB2) Coatings by Chemical Vapor Deposition (CVD)


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Biberoğlu R.

İnternational Boron Symposium BORON-2022, İstanbul, Turkey, 5 - 07 October 2022, pp.206-207

  • Publication Type: Conference Paper / Full Text
  • City: İstanbul
  • Country: Turkey
  • Page Numbers: pp.206-207
  • Gazi University Affiliated: Yes

Abstract

Refractory metal borides are classified as advanced technology boron products with their superior properties, such as high refractoriness, wear resistance, corrosion resistance, high hardness and high fracture toughness. ZrB2 is one of the leading materials in this class with its various properties. It has applications in various fields, such as the aerospace, aerospace and metallurgical industries (Kauffman, 1965). It is one of the leading materials in the high temperature ceramics group with its high melting temperature, high thermal conductivity, thermal shock resistance, low thermal expansion coefficient, high-temperature resistance and stability in extreme environments. These features make ZrB2 a potential candidate for critical systems requiring thermal protection, such as hypersonic flights, atmosphere entry system and rocket thrusters (Sonber, 2011). In the study, ZrB2 coatings were produced on copper (Cu) substrates at different temperatures by using the specially developed CVD-based gas phase coating technique. CVD is a method used to synthesize pure products at low temperature compared to other coating and powder production methods. Chlorides and hydrogen gases are among the most preferred reducing agents in CVD systems. The gas phase reactants were selected as in Reaction 1 (Pierson, 1999). ZrCl4+2 BCl3+5 H2→ZrB2+10 HCl (1) In the present study, ZrB2 refractory boride coatings were produced as a high purity coating from the gas phase using a specially developed reactor and process design (Bolluk, 2015). Phase analyzes of the samples were made with XRD, morphology and section analyzes were made with SEM-EDS.