The temperature dependence of forward and reverse bias capacitance-voltage (C-V) and conductance-voltage (G/w-V) characteristics of Au/n-InP SBDs have been investigated in the temperature range of 80-400 K at 1 MHz. Experimental results show that the values of capacitance (C) and conductance (G/w) were found a strongly function of temperature and bias voltage. The forward bias C-V plots exhibit anomalous peaks due to the existence of a series resistance (R-s) and the magnitude of these peaks decrease with increasing temperature. In addition, a negative capacitance has been observed in the forward bias C-V plots. Physical principle of the negative capacitance has been ascribed to the interface states, the contact injection and minority carrier injection effects. It is thought that the capacitance value decreases with increasing polarization and more carriers are introduced in the structure. Also, the measured capacitance (C-m) and conductance (G(m)/W) values have been corrected to obtain the real diode capacitance (C-c) and conductance (G(c)/W).