Active Micromachined Probe Structures for Fast Atomic Force Microscopy and Material Property Characterization


Onaran A. G. , BALANTEKİN M. , Değertekin F. L.

Integration and Commercialization of Micro and Nanosystems International Conference & Exhibition, Hong Kong, 3 - 05 Haziran 2008

  • Yayın Türü: Bildiri
  • Basıldığı Ülke: Hong Kong