Determination of interface states and their time constant for Au/SnO2/n-Si (MOS) capacitors using admittance measurements

Baran H. M., TATAROĞLU A.

CHINESE PHYSICS B, cilt.22, sa.4, 2013 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 22 Sayı: 4
  • Basım Tarihi: 2013
  • Doi Numarası: 10.1088/1674-1056/22/4/047303
  • Dergi Adı: CHINESE PHYSICS B
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Anahtar Kelimeler: MOS capacitor, admittance measurements, interface states, SI SCHOTTKY DIODES, SERIES RESISTANCE, VOLTAGE CHARACTERISTICS, INSULATOR LAYER, DEVICES, SEMICONDUCTOR, PARAMETERS
  • Gazi Üniversitesi Adresli: Evet

Özet

The frequency dependence of admittance measurements (capacitance-voltage (C-V) and conductance-voltage (G/omega-V)) of Au/SnO2/n-Si (MOS) capacitors was investigated by taking into account the effects of the interface states (N-ss) and series resistance (R-s) at room temperature. Admittance measurements were carried out in frequency and bias voltage ranges of 1 kHz-1 MHz and (-5 V)-(+9 V), respectively. The values of Nss and Rs were determined by using a conductance method and estimating from the admittance measurements of the MOS capacitors. At low frequencies, the interface states can follow the AC signal and yield excess capacitance and conductance. In addition, the parallel conductance (G(p)/omega) versus log (f) curves at various voltages include a peak due to the presence of interface states. It is observed that the Nss and their time constant (tau) range from 1.23 x 10(12) eV(-1).cm(2) to 1.47 x 10(12) eV(-1).cm(2) and from 7.29 x 10(-5) s to 1.81 x 10(-5) s, respectively.